JPH0417321Y2 - - Google Patents

Info

Publication number
JPH0417321Y2
JPH0417321Y2 JP1987121969U JP12196987U JPH0417321Y2 JP H0417321 Y2 JPH0417321 Y2 JP H0417321Y2 JP 1987121969 U JP1987121969 U JP 1987121969U JP 12196987 U JP12196987 U JP 12196987U JP H0417321 Y2 JPH0417321 Y2 JP H0417321Y2
Authority
JP
Japan
Prior art keywords
surface plate
guide roller
arm
retaining ring
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987121969U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6426146U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987121969U priority Critical patent/JPH0417321Y2/ja
Publication of JPS6426146U publication Critical patent/JPS6426146U/ja
Application granted granted Critical
Publication of JPH0417321Y2 publication Critical patent/JPH0417321Y2/ja
Expired legal-status Critical Current

Links

JP1987121969U 1987-08-07 1987-08-07 Expired JPH0417321Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121969U JPH0417321Y2 (en]) 1987-08-07 1987-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121969U JPH0417321Y2 (en]) 1987-08-07 1987-08-07

Publications (2)

Publication Number Publication Date
JPS6426146U JPS6426146U (en]) 1989-02-14
JPH0417321Y2 true JPH0417321Y2 (en]) 1992-04-17

Family

ID=31369465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121969U Expired JPH0417321Y2 (en]) 1987-08-07 1987-08-07

Country Status (1)

Country Link
JP (1) JPH0417321Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212956B2 (en]) * 1972-07-31 1977-04-11
JPS6067848U (ja) * 1983-10-18 1985-05-14 不二越機械工業株式会社 研磨装置

Also Published As

Publication number Publication date
JPS6426146U (en]) 1989-02-14

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